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Shaanxi Yunzhong Industry Development Co.,Ltd

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List of technical parameters of multilayer optical coating machine
Nov 14, 2016

Model

GX-1050A

GX-800A

GX-900A

GX1200A

Coating room size

1050 * 1250304 stainless steel.

800 * 1000

900 * 1050

1200 * 1250

Coated cavity size

Fixture support from the ground 1680mm, suitable for the operation of human engineering.

Fixture support from the ground 1468mm, suitable for the operation of human engineering.

Fixture support from the ground 1510mm, suitable for the operation of human engineering.

1 arch type single work piece, to a greater extent to meet the needs of customers for uniformity. Rotating 5-30r/min, stepless speed change.

2 arch type three workpiece plate, the rotation of the planet, to a greater extent to meet the needs of customers on the production. Rotating 5-30r/min, stepless speed change.

Tooling fixture

For four pieces, bracket angle is adjustable to a greater extent to meet customer needs uniformity. Rotating 5-30r/min, stepless speed change.

Arch type single work piece, to a greater extent to meet the needs of customers for uniformity. Rotating 5-30r/min, stepless speed change.

Arch type single work piece, to a greater extent to meet the needs of customers for uniformity. Rotating 5-30r/min, stepless speed change.

vacuum system

Unit: diffusion pump DIP-12000 (Lai Bao), ZJY-300 2X-70 roots pump, mechanical pump, pump maintenance 2X-8. Pipe for 304 stainless steel.

Unit: diffusion pump KT-400 (Zhen Hua), ZJY-150 2X-70 roots pump, mechanical pump, pump maintenance 2X-8.

Unit: diffusion pump KT-600 (Zhen Hua), ZJY-600 2X-70 roots pump, mechanical pump, pump maintenance 2X-8.

Unit: diffusion pump KT-800 (Zhen Hua), ZJY-600 2X-70 roots pump, mechanical pump, pump maintenance 2X-8.

Ultimate vacuum: better than 4 x Pa 10-4.

Configuration of anti turbulence equipment, safety interlock design, manual, automatic optional.

heating system

Heating pipe on the heating mode, PID control, the highest 350 C + 1.5.

Gas inflation

Gas mass flow control instrument or manual fine adjustment charging valve.

Vacuum ionization bombardment

DC 3KV, 06KW rod cathode (for coating before the self cleaning of the workpiece).

Evaporation source (optional)

1 TELEMARK-270 electron gun (import), 6KW, high pressure 4KV-10KV adjustable. Scanning, scanning, circular scanning and spiral scanning. The focus of the beam spot is good, the positioning accuracy is high, and the reproducibility is good.

2 domestic electron gun (Zhen Hua): 6KW, high pressure 4 KV ~ 8KV adjustable, can freely choose triangle wave, sine wave, square wave scanning.

3: Six hole crucible Phi 38 * 20 or four hole crucible Phi 38 * 20 plus a 87 point center arc arc crucible (for a large amount of low melting point evaporation materials) or four points with 48 x 18 crucible.

Ion source (optional)

1 RF (radio frequency) ion source (import).

2 5KVA Holzer ion source (Zhen Huachan), used for electroplating before cleaning or plating process to assist plating, is conducive to improve the film refractive index, firmness, improve the film density, adhesion.

Film thickness control system (selection)

1.MDC-360 crystal control device (imported) can store 1 ~ 99 layer automatic coating process, 99 Kinds of program data, precision 0.5%+1 fixed error. 2TELEMARK-880 crystal control device (imported): can store 1 to 99 layers of automatic coating process, 99 Kinds of program data. Precision 0.5%+1 fixed error.

3.TELEMARK-820 photocontroller (import): full spectrum end using a multi wavelength analysis technology, through the transmission of monitoring 370-870 mm (or reflectance) curve analysis to determine the end of the film. The control precision is high, and the single wave length control, automatic control and manual control can be used. Additional MACILEOD membrane system calculation software, high degree of integration.

4.TELEMARK-820 light controller with TELEMARK-880 controller can meet the crystal film with high accuracy and high repeatability requirements. With the host computer can realize automatic control.

5 domestic photocontroller (such as type 9704 supporting the monochromator wavelength 330 ~ 870 etc.) adjustable, precision can reach 1.5nm.

Hand operated device

With magnetic base, can be placed in the vacuum chamber door and control cabinet arbitrary position.


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